• DocumentCode
    905141
  • Title

    Experimental study of CF4 conical theta pinch plasma expanding into vacuum

  • Author

    Pedrow, Patrick D. ; Nasiruddin, Abutaher M.

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Washington State Univ., Pullman, WA, USA
  • Volume
    17
  • Issue
    1
  • fYear
    1989
  • fDate
    2/1/1989 12:00:00 AM
  • Firstpage
    17
  • Lastpage
    23
  • Abstract
    Langmuir probe, photodiode, and optical multichannel analyzer (OMA) measurements have been made on a pulsed CF4 conical theta-pinch plasma. A cloud of CF4 was puffed into a conical theta-pinch coil, converted to plasma, and propelled into the vacuum region ahead of the expanding gas cloud. At a position 67 cm away from the conical theta-pinch coil, the plasma arrived in separate packets that were about 20 μs in duration. The average drift velocity of these packets corresponded to an energy of about 3 eV. The OMA measurements showed that the second packet contained neutral atomic fluorine as well as charged particles. The electron temperature and ion density in the second packet were 2.0 eV and 1.5×1013 cm-3, respectively. The electron temperature and ion density in the wake plasma were 8.3 eV and 4×1011 cm-3 , respectively. This device can be used for plasma processing or as a laboratory test of numerical and analytical models of the expansion of plasma into vacuum
  • Keywords
    Langmuir probes; organic compounds; pinch effect; plasma density; plasma temperature; 2.0 eV; 20 mus; 3 eV; 67 cm; 8.3 eV; F; Langmuir probe; OMA measurements; analyzer; charged particles; conical theta pinch plasma; drift velocity; electron temperature; expanding gas cloud; ion density; measurements; neutral atomic fluorine; optical multichannel; photodiode; plasma processing; vacuum region; wake plasma; Atomic measurements; Clouds; Coils; Electrons; Plasma density; Plasma devices; Plasma materials processing; Plasma measurements; Plasma temperature; Pulse measurements;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/27.21666
  • Filename
    21666