DocumentCode
905141
Title
Experimental study of CF4 conical theta pinch plasma expanding into vacuum
Author
Pedrow, Patrick D. ; Nasiruddin, Abutaher M.
Author_Institution
Dept. of Electr. & Comput. Eng., Washington State Univ., Pullman, WA, USA
Volume
17
Issue
1
fYear
1989
fDate
2/1/1989 12:00:00 AM
Firstpage
17
Lastpage
23
Abstract
Langmuir probe, photodiode, and optical multichannel analyzer (OMA) measurements have been made on a pulsed CF4 conical theta-pinch plasma. A cloud of CF4 was puffed into a conical theta-pinch coil, converted to plasma, and propelled into the vacuum region ahead of the expanding gas cloud. At a position 67 cm away from the conical theta-pinch coil, the plasma arrived in separate packets that were about 20 μs in duration. The average drift velocity of these packets corresponded to an energy of about 3 eV. The OMA measurements showed that the second packet contained neutral atomic fluorine as well as charged particles. The electron temperature and ion density in the second packet were 2.0 eV and 1.5×1013 cm-3, respectively. The electron temperature and ion density in the wake plasma were 8.3 eV and 4×1011 cm-3 , respectively. This device can be used for plasma processing or as a laboratory test of numerical and analytical models of the expansion of plasma into vacuum
Keywords
Langmuir probes; organic compounds; pinch effect; plasma density; plasma temperature; 2.0 eV; 20 mus; 3 eV; 67 cm; 8.3 eV; F; Langmuir probe; OMA measurements; analyzer; charged particles; conical theta pinch plasma; drift velocity; electron temperature; expanding gas cloud; ion density; measurements; neutral atomic fluorine; optical multichannel; photodiode; plasma processing; vacuum region; wake plasma; Atomic measurements; Clouds; Coils; Electrons; Plasma density; Plasma devices; Plasma materials processing; Plasma measurements; Plasma temperature; Pulse measurements;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/27.21666
Filename
21666
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