Title :
Monte Carlo Simulation and Analysis of Elastic and Inelastic Scattering of Electrons in Insulators
Author :
Woolf, S. ; Bradford, J.N.
Author_Institution :
Arcon Corporation 260 Bear Hill Road Waltham, MA 02154
Abstract :
An electron transport Monte Carlo program, using single scatter cross sections and the latest phonon scattering theory, has been developed to obtain electron and hole distributions in insulators subjected to electron bombardment.
Keywords :
Algorithm design and analysis; Charge carrier processes; Electron beams; History; Insulation; Monte Carlo methods; Particle scattering; Phonons; Silicon compounds; Solid state circuits;
Journal_Title :
Nuclear Science, IEEE Transactions on
DOI :
10.1109/TNS.1987.4337486
