• DocumentCode
    914909
  • Title

    Analysis of MOSFET Capacitances and Their Behavior at Short-Channel Lengths Using an AC Device Simulator

  • Author

    Ohkura, Yasuyuki ; Toyabe, Toru ; Masuda, Hiroo

  • Author_Institution
    Central Research Laboratory, Hitachi Ltd., Tokyo, Japan
  • Volume
    6
  • Issue
    3
  • fYear
    1987
  • fDate
    5/1/1987 12:00:00 AM
  • Firstpage
    423
  • Lastpage
    430
  • Abstract
    Intrinsic MOSFET capacitances are calculated using the three-dimensional ac device simulator CADDETH, and distributions of the internal ac currents are studied. The simulations clearly show the influence of velocity saturation. Finally short-channel effects on the intrinsic MOSFET capacitances are analyzed.
  • Keywords
    Analytical models; Charge carrier processes; Computational modeling; Frequency; Gradient methods; MOSFET circuits; Parasitic capacitance; Poisson equations; Very large scale integration; Voltage;
  • fLanguage
    English
  • Journal_Title
    Computer-Aided Design of Integrated Circuits and Systems, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0278-0070
  • Type

    jour

  • DOI
    10.1109/TCAD.1987.1270288
  • Filename
    1270288