DocumentCode :
920225
Title :
Love wave synchronous resonator on quartz with SiO2 layer
Author :
Soluch, W.
Author_Institution :
Inst. of Electron. Mater. Technol., Warsaw, Poland
Volume :
42
Issue :
8
fYear :
2006
fDate :
4/13/2006 12:00:00 AM
Firstpage :
495
Lastpage :
497
Abstract :
Love wave and surface transverse wave are two independent acoustic modes propagating in the area of periodical electrodes on 35°YX90° cut quartz with a SiO2 layer. A synchronous resonator and the scattering matrix method were used for determination of these waves´ parameters. For the Love wave mode, at a frequency of about 492 MHz, insertion loss, loaded and unloaded quality factors of about 11 dB, 5500 and 7800, respectively, were obtained. This resonator is promising for applications in sensors.
Keywords :
Love waves; S-matrix theory; acoustic wave scattering; quartz; silicon compounds; surface acoustic wave resonators; Love wave synchronous resonator; SiO2; scattering matrix method; surface transverse waves; wave parameters;
fLanguage :
English
Journal_Title :
Electronics Letters
Publisher :
iet
ISSN :
0013-5194
Type :
jour
DOI :
10.1049/el:20064296
Filename :
1624769
Link To Document :
بازگشت