Miniature temperature-insensitive Fabry-Pe/spl acute/rot fiber-optic pressure sensor

Author

Juncheng Xu ; Xingwei Wang ; Cooper, K.L. ; Pickrell, G.R. ; Anbo Wang

Author_Institution

Dept. of Electr. & Comput. Eng., Virginia Polytech. Inst. & State Univ.

Volume

18

Issue

10

fYear

2006

fDate

5/1/2006 12:00:00 AM

Firstpage

1134

Lastpage

1136

Abstract

We present a miniature fiber-optic pressure sensor with a diameter of only 125 mum. The sensor works as an extrinsic Fabry-Peacuterot interferometer and the cavity length can be controlled with a resolution of about several nanometers. Also the sensor sensitivity can be easily adjusted by controlling the sensor gauge length. A passive temperature compensation scheme was used to reduce most of the sensor´s temperature dependence. Since the sensor is composed entirely of fused silica, it is reliable, biocompatible, corrosion resistant, and immune to electromagnetic interference and has high-temperature capability

Keywords

Fabry-Perot interferometers; fibre optic sensors; microsensors; pressure sensors; silicon compounds; 125 mum; Fabry-Perot sensor; SiO₂; biocompatible sensor; corrosion resistant sensor; electromagnetic interference immunity; extrinsic Fabry-Perot interferometer; fiber-optic sensor; fused silica sensor; high-temperature sensor; miniature sensor; passive temperature compensation; pressure sensor; sensor gauge length; sensor reliability; sensor sensitivity; temperature-insensitive sensor; Biosensors; Electromagnetic measurements; Immune system; Optical fiber sensors; Optical fibers; Pressure measurement; Sensor fusion; Strain measurement; Temperature dependence; Temperature sensors; Fabry–PÉrot (FP); fiber-optic sensor; miniature sensor; pressure sensor;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/LPT.2006.873361

Filename

1626339