DocumentCode
924422
Title
Vertical high-mobility wrap-gated InAs nanowire transistor
Author
Bryllert, Tomas ; Wernersson, Lars-Erik ; Fröberg, Linus E. ; Samuelson, Lars
Author_Institution
Dept. of Solid State Phys., Lund Univ., Sweden
Volume
27
Issue
5
fYear
2006
fDate
5/1/2006 12:00:00 AM
Firstpage
323
Lastpage
325
Abstract
In this letter, the authors demonstrate a vertical wrap-gated field-effect transistor based on InAs nanowires [Proc. DRC, 2005, p. 157]. The nanowires have a diameter of 80 nm and are grown using selective epitaxy; a matrix of typically 10 × 10 vertically standing wires is used as channel in the transistor. The authors measure current saturation at Vds=0.15 V (Vg=0 V), and a high mobility, compared to the previous nanowire transistors, is deduced.
Keywords
III-V semiconductors; MISFET; indium compounds; nanowires; 0.15 V; 80 nm; InAs; current saturation; nanowire transistor; selective epitaxy growth; vertical high mobility wrap-gated field-effect transistor; Epitaxial growth; FETs; Nanostructures; Physics; Semiconductor materials; Solid state circuits; Sputter etching; Transistors; Wet etching; Wires; Field-effect transistor (FET); InAs; nanowires; wrap gate;
fLanguage
English
Journal_Title
Electron Device Letters, IEEE
Publisher
ieee
ISSN
0741-3106
Type
jour
DOI
10.1109/LED.2006.873371
Filename
1626445
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