Title :
Fine tuning of surface-acoustic-wave resonator filters with metallisation thickness
Author :
Haydl, W.H. ; Cross, P.S.
Author_Institution :
Fraunhofer Gesellschaft, Institut fÿr Angewandte Festkörperphysik, Freiburg, West Germany
Abstract :
Two-port surface-acoustic-wave resonator filters with Q factors in excess of 3000 and a sidelobe suppression of 30 dB have been fabricated from yz LiNbO3 with aluminium metallisation. The dispersion of the centre frequency with aluminium thickness has been found to be 70¿10 kHz/¿m at 35 MHz. The ability to fine tune with metal thickness has been used to compensate inherent substrate inhomogeneities and to fabricate a high-Q factor flat-top filter.
Keywords :
Q-factor; acoustic surface wave devices; crystal filters; crystal resonators; metallisation; tuning; 35 MHz; LiNbO3; Q factors; aluminium metallisation; centre frequency; fine tuning; flat top filter; metallisation thickness; sidelobe suppression; substrate inhomogeneities; surface acoustic wave resonator filters;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19750190
