Title :
Design and fabrication of a mode rectangular X-cut quartz resonator with zero temperature coefficient
Author :
Yokoyama, Yukio ; Kawashima, Hirofumi ; Kanie, Hisashi
Author_Institution :
Appl. Electron., Tokyo Univ. of Sci.
fDate :
5/1/2006 12:00:00 AM
Abstract :
Rectangular X-cut quartz crystal resonators with cut angles thetas > 5.0deg and aspect ratios Rzy (= width 2z0/length 2y0) from 0.3 to 0.5 are investigated. The resonators oscillate mode is a length-extensional mode. A semiempirical frequency equation was derived from the stress expressed in terms of the trigonometric and the hyperbolic transcendental functions with constants estimated by the regression curve fit to the stress simulated by the finite-element method (FEM). Contours on which a point satisfies a zero first order temperature coefficient condition are shown in a cut angle thetas and Rzy diagram. We proved that a fabricated resonator with Rzy = 0.400 and thetas = 16.0deg, whose design parameter is located in the area of the contour, had a zero temperature coefficient
Keywords :
crystal resonators; finite element analysis; optical design techniques; optical fabrication; optical resonators; regression analysis; SiO2; X-cut quartz resonator; aspect ratio; contour; finite-element method; hyperbolic transcendental functions; length-extensional mode; mode rectangular quartz resonator; regression curve fit; resonator oscillate mode; semiempirical frequency equation; stress simulation; trigonometric transcendental functions; zero temperature coefficient; Capacitance; Energy consumption; Equations; Fabrication; Finite element methods; Frequency estimation; Resonance; Resonant frequency; Stress; Temperature;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
DOI :
10.1109/TUFFC.2006.1632675