Title :
A superconductive integrated circuit foundry
Author :
Abelson, L.A. ; Thomasson, S.L. ; Murduck, J.M. ; Elmadjian, R. ; Akerling, G. ; Kono, R. ; Chan, H.W.
Author_Institution :
TRW Space & Technol. Group, Redondo Beach, CA, USA
fDate :
3/1/1993 12:00:00 AM
Abstract :
A foundry has been established for production of superconductive integrated circuits, modeled after semiconductor application-specific integrated circuit (IC) production. The foundry supports and improves standardized Nb-based IC processing, and develops advanced processes such as a novel NbN-based process. The authors discuss the operation of the foundry, standardized process technologies, design rules, process flows, in-line product tracking, statistical process control, and automated parametric testing. The advantages of fine-line lithography and a class 10/100 environment are presented. Internal and external customer support with standard layout and circuit design tools enables reliable, quick turnaround production of a wide range of circuits. Finally, the authors present examples of concurrent device and process development towards improved, denser circuits, while maintaining a disciplined foundry environment.<>
Keywords :
automatic testing; integrated circuit manufacture; lithography; statistical process control; superconducting integrated circuits; Nb based circuits; NbN based circuits; advanced processes; automated parametric testing; circuit design tools; customer support; design rules; fine-line lithography; in-line product tracking; layout design tools; operation; process flows; standardized process technologies; statistical process control; superconductive integrated circuit foundry; Application specific integrated circuits; Circuit testing; Foundries; Integrated circuit modeling; Integrated circuit technology; Process control; Process design; Production; Superconducting integrated circuits; Superconductivity;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
