DocumentCode
945656
Title
A novel double-base heterojunction bipolar transistor for low-temperature bipolar logic
Author
Prinz, E.J. ; Xiao, X. ; Schwartz, P.V. ; Sturm, James C.
Author_Institution
Dept. of Electr. Eng., Princeton Univ., NJ
Volume
39
Issue
11
fYear
1992
fDate
11/1/1992 12:00:00 AM
Firstpage
2636
Lastpage
2637
Abstract
Summary form only given. The authors report a novel double-base heterojunction bipolar transistor (DB-HBT) in the Si/SiGe material system which can operate with high gain in a single-transistor NAND gate at 77 K. The device structure is similar to that of a Si/SiGe/Si HBT, except for an intrinsic Si layer inserted into the p-SiGe base. The intrinsic Si layer is used to electrically isolate the two SiGe base layers of an n-Si/p-SiGe/i-Si/p-SiGe/n-Si DB-HBT, because the valence-band discontinuity at the SiGe/Si heterojunction acts as a barrier for holes. A key point is that the Si layer introduces only a very small barrier in the conduction band because most of the bandgap difference between unstrained Si and strained SiGe occurs at a valence band offset ΔE V
Keywords
Ge-Si alloys; bipolar integrated circuits; cryogenics; elemental semiconductors; heterojunction bipolar transistors; integrated logic circuits; logic gates; semiconductor materials; silicon; 77 K; Si-SiGe-Si-SiGe-Si; SiGe base layers; bandgap difference; conduction band; double base HBT; heterojunction bipolar transistor; intrinsic Si layer; low-temperature bipolar logic; n-Si/p-SiGe/i-Si/p-SiGe/n-Si; single-transistor NAND gate; valence-band discontinuity; Annealing; Etching; Germanium silicon alloys; Heterojunction bipolar transistors; Logic; Plasma temperature; Shape control; Silicon germanium; Thermionic emission; Voltage;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/16.163484
Filename
163484
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