Title :
In-situ RHEED-TRAXS analysis during the preparation of YBa/sub 2/Cu/sub 3/O/sub 7-x/ thin films
Author :
Aoki, Y. ; Kamei, M. ; Ogota, S. ; Usui, T. ; Morishita, T.
Author_Institution :
Superconductivity Res. Lab., ISTEC, Tokyo, Japan
fDate :
3/1/1993 12:00:00 AM
Abstract :
Reflection high-energy electron diffraction (RHEED) with total-reflection-angle X-ray spectroscopy (TRAXS) has been applied to the chemical and structure analysis during preparation of YB/sub 2/Cu/sub 3/O/sub 7-x/ (YBCO) films. The characteristic X-rays of YL alpha , BaL alpha , and CuK alpha emitted even from 0.8-AA-thick YBCO were clearly observed by TRAXS. In addition, the surface sensitivity of this method was found to be comparable to or higher than that of Auger electron spectroscopy. From the RHEED observation, it was revealed that the lattice spacing drastically changes from 4.09 AA to 3.8 AA at a mean thickness of less than one unit cell of YBCO at the early growth stage.<>
Keywords :
Auger effect; X-ray chemical analysis; barium compounds; high-temperature superconductors; reflection high energy electron diffraction; superconducting thin films; surface structure; vapour deposition; yttrium compounds; 0.8 angstroms; Auger electron spectroscopy; BaL alpha; CuK alpha; MgO substrate; YBa/sub 2/Cu/sub 3/O/sub 7-x/ thin films; YL alpha; characteristic X-rays; chemical analysis; high temperature superconductors; in-situ RHEED-TRAXS analysis; lattice spacing; reactive coevaporation; reflection high energy electron diffraction; structure analysis; surface sensitivity; total-reflection-angle X-ray spectroscopy; Chemical analysis; Diffraction; Dispersion; Energy management; Lattices; Substrates; Surface finishing; Transistors; X-rays; Yttrium barium copper oxide;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
