DocumentCode :
947435
Title :
Variable structure control of a piezoelectric actuator for a scanning tunneling microscope
Author :
Bonnail, Nicolas ; Tonneau, Didier ; Jandard, Franck ; Capolino, Gérard-André ; Dallaporta, Hervé
Author_Institution :
Univ. of Marseille, France
Volume :
51
Issue :
2
fYear :
2004
fDate :
4/1/2004 12:00:00 AM
Firstpage :
354
Lastpage :
363
Abstract :
Scanning probe microscopes are now widely used in the field of material science and engineering for surface imaging at atomic scale. Their principle is based on the surface probing by a sharp tip approached at a nanometric distance of the surface. The probe is fixed to piezoelectric actuators allowing its displacement above the surface. An electronic command of a scanning tunneling microscope (STM) has been designed and tested. The regulation feedback loop of the tunnel current includes an integral controller, as is the case in commercial equipment. An extra control by variable-structure system has been implemented on this electronic command. Its principle is based on the commutation of the feedback sign. The effect on the system performance of the variable structure control is presented and discussed. An STM head has been modeled and all the model parameters have been determined. The model has been validated by comparison of the experimental and simulated responses of the system under excitation.
Keywords :
controllers; electric current control; electric current measurement; motion control; motion measurement; piezoelectric actuators; scanning tunnelling microscopy; variable structure systems; STM; acoustic motor; electronic command; feedback loop regulation; feedback sign commutation; integral controller; motion control; motion measurement; nanometric distance; piezoelectric actuator; scanning probe microscope; scanning tunneling microscope; surface probing; tunnel current; variable structure control; Control systems; Electric variables control; Electronic equipment testing; Feedback loop; Materials science and technology; Piezoelectric actuators; Probes; Scanning electron microscopy; System performance; Tunneling;
fLanguage :
English
Journal_Title :
Industrial Electronics, IEEE Transactions on
Publisher :
ieee
ISSN :
0278-0046
Type :
jour
DOI :
10.1109/TIE.2004.825266
Filename :
1282023
Link To Document :
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