• DocumentCode
    949407
  • Title

    Radiation-induced interface traps in MOS devices: capture cross section and density of states of Pb1 silicon dangling bond centers

  • Author

    Lenahan, P.M. ; Bohna, N.A. ; Campbell, J.P.

  • Author_Institution
    Pennsylvania State Univ., University Park, PA, USA
  • Volume
    49
  • Issue
    6
  • fYear
    2002
  • fDate
    12/1/2002 12:00:00 AM
  • Firstpage
    2708
  • Lastpage
    2712
  • Abstract
    Pb centers dominate radiation-induced interface defects. On the (100) Si/SiO2 interface, the Pb0 center dominates radiation damage, but another center, the Pb1, plays a secondary role. Neither the electronic density of states nor the capture cross section of this center are well established. This study provides information about both the density of states and capture cross section of Pb1. The study also shows that some refinement is required in techniques utilized to separate interface trap space charge from space charge in the oxide.
  • Keywords
    MIS devices; dangling bonds; electronic density of states; elemental semiconductors; interface states; radiation effects; semiconductor-insulator boundaries; silicon; silicon compounds; space charge; (100) Si/SiO2 interface; MOS devices; Pb1 center; Si-SiO2; capture cross section; dangling band defects; electronic density of states; interface trap space charge; oxide space charge; radiation-induced interface defects; Bonding; Bridges; Electron traps; MOS devices; Microwave measurements; Paramagnetic resonance; Silicon; Space charge; Spontaneous emission; Temperature;
  • fLanguage
    English
  • Journal_Title
    Nuclear Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9499
  • Type

    jour

  • DOI
    10.1109/TNS.2002.805357
  • Filename
    1134208