• DocumentCode
    950805
  • Title

    A simple approximation for calculating impurity profiles for a two-step diffusion process

  • Author

    Shrivastava, Ritu ; Marshak, Alan H.

  • Author_Institution
    Louisiana State University, Baton Rouge, LA
  • Volume
    65
  • Issue
    11
  • fYear
    1977
  • Firstpage
    1614
  • Lastpage
    1615
  • Abstract
    An accurate approximation for calculating two-step diffusion profiles is given. The result valid for the field-free case has the same form as the Gaussian profile resulting from the conventional delta function approximation. The result is simple enough to be useful for first-order analytic evaluation of device fabrication parameters.
  • Keywords
    Diffusion processes; Equations; Frequency; Function approximation; Hybrid integrated circuits; Impurities; Integrated circuit modeling; Temperature distribution; Voltage control; Voltage-controlled oscillators;
  • fLanguage
    English
  • Journal_Title
    Proceedings of the IEEE
  • Publisher
    ieee
  • ISSN
    0018-9219
  • Type

    jour

  • DOI
    10.1109/PROC.1977.10785
  • Filename
    1455054
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=950805