MEMS tilt-mirror spatial light modulator for a dynamic spectral equalizer

Author

Bernstein, Jonathan J. ; Dokmeci, Mehmet R. ; Kirkos, Gregory ; Osenar, Amy Bowman ; Peanasky, John ; Pareek, Ajay

Author_Institution

Corning IntelliSense, Wilmington, MA, USA

Volume

13

Issue

2

fYear

2004

fDate

4/1/2004 12:00:00 AM

Firstpage

272

Lastpage

278

Abstract

This paper presents a linear array of tilting mirrors used to attenuate the various wavelengths in a DWDM optical signal. Attenuation of 21 dB at snap-down was achieved by the tilting mirrors, substituting for a liquid crystal spatial light modulator (SLM) in a commercial dynamic spectral equalizer (DSE). Linear fill factor of 92% was achieved, allowing closely spaced wavelength channels to be individually attenuated. A two layer polysilicon process with a thick epi-poly mirror was used to fabricate the SLM. Initial mirrors had a radius of curvature of 25 cm. A novel accelerated HF-H₂SO₄ etch allowed 100 μm wide mirrors to be undercut in 12 min with no etch release holes.

Keywords

equalisers; liquid crystal devices; micro-optics; micromechanical devices; micromirrors; optical attenuators; spatial light modulators; wavelength division multiplexing; 100E-6 m; 12 mins; 21 dB; 25 cm; DWDM optical signal; HF-H₂SO₄; MEMS; SLM fabrication; closely spaced wavelength channels; dynamic spectral equalizer; linear tilting mirror array; liquid crystal spatial light modulator; thick epi-poly mirror; tilt-mirror spatial light modulator; two layer polysilicon process; Acceleration; Equalizers; Etching; Liquid crystals; Micromechanical devices; Mirrors; Optical arrays; Optical attenuators; Optical modulation; Wavelength division multiplexing;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/JMEMS.2004.824896

Filename

1284365