DocumentCode
951441
Title
Piezoelectric thin film unidirectional SAW transducer and filter
Author
Sato, Hikaru ; Meguro, Tomomi ; Yamanouchi, Kazuhiko ; Shibayama, Kiyoshi
Volume
66
Issue
1
fYear
1978
Firstpage
102
Lastpage
104
Abstract
Small passband ripple piezoelectric thin film unidirectional transducers and filters are presented. ZnO thin film deposited on a fused silica was used in the experiment. As the result, the characteristics of no pass-band ripple and minimum insertion loss of 5.2 dB, and also the directionality of 22 to 29 dB per one transducer are obtained.
Keywords
Acoustic transducers; Electrodes; Filters; Frequency; Piezoelectric films; Piezoelectric transducers; Sputtering; Substrates; Surface acoustic waves; Zinc oxide;
fLanguage
English
Journal_Title
Proceedings of the IEEE
Publisher
ieee
ISSN
0018-9219
Type
jour
DOI
10.1109/PROC.1978.10851
Filename
1455120
Link To Document