• DocumentCode
    952864
  • Title

    Synthesis and analysis of d.l.t.s. spectra from m.o.s. surface states

  • Author

    Whight, K.R.

  • Author_Institution
    Philips Research Laboratories, Redhill, UK
  • Volume
    15
  • Issue
    23
  • fYear
    1979
  • Firstpage
    744
  • Lastpage
    745
  • Abstract
    Given Nss and ¿ss as functions of energy and temperature, a procedure is developed to synthesise d.l.t.s spectra under arbitrary experimental conditions. Methods of analysis are then considered to determine Nss and ¿ss from capture experiments.
  • Keywords
    deep levels; metal-insulator-semiconductor structures; surface electron states; DLTS; MOS surface states; capture experiments; deep level transient spectroscopy;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19790532
  • Filename
    4243560