DocumentCode
952864
Title
Synthesis and analysis of d.l.t.s. spectra from m.o.s. surface states
Author
Whight, K.R.
Author_Institution
Philips Research Laboratories, Redhill, UK
Volume
15
Issue
23
fYear
1979
Firstpage
744
Lastpage
745
Abstract
Given Nss and ¿ss as functions of energy and temperature, a procedure is developed to synthesise d.l.t.s spectra under arbitrary experimental conditions. Methods of analysis are then considered to determine Nss and ¿ss from capture experiments.
Keywords
deep levels; metal-insulator-semiconductor structures; surface electron states; DLTS; MOS surface states; capture experiments; deep level transient spectroscopy;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19790532
Filename
4243560
Link To Document