• DocumentCode
    953052
  • Title

    Surface-relief type Bragg grating reflector fabricated after overcladding removal

  • Author

    Ishii, M. ; Hibino, Y. ; Sugita, Atsushi ; Tamamura, T.

  • Author_Institution
    Opto-Electron. Lab., Ibaraki, Japan
  • Volume
    29
  • Issue
    19
  • fYear
    1993
  • Firstpage
    1684
  • Lastpage
    1685
  • Abstract
    A novel silica-based Bragg grating reflector on Si substrate is described. The reflector is formed on a core whose overcladding layer is removed by RIE until is is level with the core surface. The reflector which comprises a rectangular relief type grating only 1.6 mm long has the advantages of a highly controllable Bragg wavelength and a high reflectivity of 76% for the TE mode.
  • Keywords
    diffraction gratings; integrated optics; integrated optoelectronics; light reflection; mirrors; optical waveguides; 1.6 mm; Bragg grating reflector; GeO 2-SiO 2 core; RIE; Si substrate; SiO 2-Si; TE mode; overcladding removal; planar lightwave circuit; rectangular relief type grating;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19931120
  • Filename
    237346