Integrated force arrays: theory and modeling of static operation

Author

Jacobson, James D. ; Goodwin-Johansson, ScottH ; Bobbio, StephenM ; Bartlett, Charles A. ; Yadon, Lindsey N.

Author_Institution

MCNC, Research Triangle Park, NC, USA

Volume

4

Issue

3

fYear

1995

fDate

9/1/1995 12:00:00 AM

Firstpage

139

Lastpage

150

Abstract

Integrated force arrays (IFAs) are a novel means of microelectromechanical actuation. They are membranes that consist of thousands of micron-scale deformable capacitors and are capable of contraction and force exertion in one dimension by application of an applied voltage. The theory and modeling of the static operation of a representative unit device and an array is presented. The electrostatic and elastic forces present in the system are considered and classical beam theory and superposition are applied to calculate the voltage-induced closure and force generation of the networks without the aid of finite element analysis. It is shown that contraction and force generation are expected at reasonable voltages for these modular structures: Ideal system contraction on the order of 40% is possible and minimum external forces of 4500 μN/mm² are expected with the application of 50 V

Keywords

capacitors; electrostatic devices; microactuators; 50 V; classical beam theory; elastic forces; force generation; integrated force arrays; microelectromechanical actuation; micron-scale deformable capacitors; static operation; system contraction; voltage-induced closure; Biomembranes; Capacitors; Conducting materials; Electrostatic analysis; Fabrication; Finite element methods; Insulation; Isolation technology; Jacobian matrices; Voltage;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/84.465121

Filename

465121