• DocumentCode
    953511
  • Title

    Use of scanning electron microscope for multichannel sampling oscillography

  • Author

    Feuerbaum, H.P. ; Wolfgang, E.

  • Author_Institution
    Forschungslaboratorien der Siemens AG, Munich, Germany
  • Volume
    66
  • Issue
    8
  • fYear
    1978
  • Firstpage
    984
  • Lastpage
    985
  • Abstract
    A method for measuring two or more waveforms on different metal lines inside an integrated circuit and displaying the result as a stationary image on a CRT screen is described. The finely focused electron beam of a scanning electron microscope serves as a probe with a minimal current load on the sample. For example, two measured waveforms are displayed with a time resolution of 25 ns and a voltage resolution of 500 mV.
  • Keywords
    Cathode ray tubes; Electron beams; Focusing; Image sampling; Integrated circuit measurements; Probes; Sampling methods; Scanning electron microscopy; Time measurement; Voltage;
  • fLanguage
    English
  • Journal_Title
    Proceedings of the IEEE
  • Publisher
    ieee
  • ISSN
    0018-9219
  • Type

    jour

  • DOI
    10.1109/PROC.1978.11063
  • Filename
    1455332
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=953511