DocumentCode
954593
Title
Analysis of the performance of a MEMS micromirror
Author
Wen, Jie ; Hoa, Xuyen D. ; Kirk, Andrew G. ; Lowther, David A.
Author_Institution
Dept. of Electr. & Comput. Eng., McGill Univ., Montreal, Que., Canada
Volume
40
Issue
2
fYear
2004
fDate
3/1/2004 12:00:00 AM
Firstpage
1410
Lastpage
1413
Abstract
This paper describes the structure and analysis of a particular micro-electromechanical-systems (MEMS) micromirror device that can be used as an optical switch. The predicted performance is compared with measurements. Sufficient details are given to enable this device to be used as a benchmark problem for electric field analysis and coupled structural-electric systems.
Keywords
benchmark testing; electric fields; micromirrors; optical switches; MEMS micromirror; benchmark; benchmark problem; coupled structural-electric systems; design; electric field analysis; field modeling; micro-electromechanical-systems micromirror; optical switch; performance analysis; Communication switching; Dielectric substrates; Etching; Fabrication; Micromechanical devices; Micromirrors; Mirrors; Optical switches; Performance analysis; Silicon;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/TMAG.2004.824563
Filename
1284686
Link To Document