Title :
Correction of spreading resistance data obtained from bevelled shallow junctions
Author :
Abbasi, S.A. ; Brunnschweiler, A.
Author_Institution :
University of Southampton, Department of Electronics, Southampton, UK
Abstract :
The spreading resistance profile obtained from a bevelled shallow diffused layer differs significantly from the profile obtained by successive layer removal. This difference may be at least partially explained by the poor lateral resolution of the spreading resistance method. A computer correction technique is described which has been found to completely remove the discrepancy observed at the surface.
Keywords :
electric resistance; electronic engineering computing; p-n junctions; bevelled shallow junctions; computer correction technique; lateral resolution; spreading resistance profile;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19800354
