DocumentCode
956944
Title
Effects of DC bias on the fabrication of amorphous GdCo RF sputtered films
Author
Bourne, H.C., Jr. ; Goldfarb, R.B. ; Wilson, W.L., Jr. ; Zwingman, R.
Author_Institution
Rice University, Houston, Texas
Volume
11
Issue
5
fYear
1975
fDate
9/1/1975 12:00:00 AM
Firstpage
1332
Lastpage
1334
Abstract
An investigation has been made on the effects of a dc bias field applied to Gd1-x COx thin films during rf sputter deposition. Such films may possess uniaxial magnetic anisotropy with easy axis perpendicular to the plane of the film and may be used in magnetic bubble devices. Uniformity in composition, thickness and magnetic properties has been achieved and film composition has been controlled to within one percent. However, significant variations of magnetic properties were observed from film to film.
Keywords
Amorphous magnetic films/devices; Magnetic bubble films; Sputtering; Amorphous magnetic materials; Amorphous materials; Fabrication; Magnetic anisotropy; Magnetic devices; Magnetic films; Magnetic properties; Perpendicular magnetic anisotropy; Radio frequency; Sputtering;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/TMAG.1975.1058897
Filename
1058897
Link To Document