• DocumentCode
    956944
  • Title

    Effects of DC bias on the fabrication of amorphous GdCo RF sputtered films

  • Author

    Bourne, H.C., Jr. ; Goldfarb, R.B. ; Wilson, W.L., Jr. ; Zwingman, R.

  • Author_Institution
    Rice University, Houston, Texas
  • Volume
    11
  • Issue
    5
  • fYear
    1975
  • fDate
    9/1/1975 12:00:00 AM
  • Firstpage
    1332
  • Lastpage
    1334
  • Abstract
    An investigation has been made on the effects of a dc bias field applied to Gd1-xCOxthin films during rf sputter deposition. Such films may possess uniaxial magnetic anisotropy with easy axis perpendicular to the plane of the film and may be used in magnetic bubble devices. Uniformity in composition, thickness and magnetic properties has been achieved and film composition has been controlled to within one percent. However, significant variations of magnetic properties were observed from film to film.
  • Keywords
    Amorphous magnetic films/devices; Magnetic bubble films; Sputtering; Amorphous magnetic materials; Amorphous materials; Fabrication; Magnetic anisotropy; Magnetic devices; Magnetic films; Magnetic properties; Perpendicular magnetic anisotropy; Radio frequency; Sputtering;
  • fLanguage
    English
  • Journal_Title
    Magnetics, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9464
  • Type

    jour

  • DOI
    10.1109/TMAG.1975.1058897
  • Filename
    1058897