DocumentCode
957540
Title
Thermal Oxide Film Deposition Monitoring Algorithm
Author
Smith, E. George
Author_Institution
IBM Federal Systems Div.,VA
Volume
2
Issue
2
fYear
1979
fDate
6/1/1979 12:00:00 AM
Firstpage
263
Lastpage
265
Abstract
A software-implemented algorithm for controlling the amount of thermal oxide film grown on a substrate, along with some experimental results, is presented.
Keywords
Crystal growth; Integrated circuit fabrication; Semiconductor device fabrication; Size measurement; Fatigue; LAN interconnection; Lead; Monitoring; Optical films; Ovens; Process control; Reflectivity; Temperature; Thermal stresses;
fLanguage
English
Journal_Title
Components, Hybrids, and Manufacturing Technology, IEEE Transactions on
Publisher
ieee
ISSN
0148-6411
Type
jour
DOI
10.1109/TCHMT.1979.1135451
Filename
1135451
Link To Document