Title :
A fully integrated multisite pressure sensor for wireless arterial flow characterization
Author :
DeHennis, Andrew D. ; Wise, Kensall D.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Univ. of Michigan, Ann Arbor, MI, USA
fDate :
6/1/2006 12:00:00 AM
Abstract :
This paper presents a fully integrated battery-free sensing system that uses a two-site wireless pressure measurement for the detection of arterial stenosis. The remotely powered system uses a backscatter-modulated passive-telemetry interface and transmits sensor as well as reference information to an external system. The monolithic process used to realize the system integrates a 3 μm BiCMOS circuit with silicon-on-glass absolute pressure sensors and an on-chip antenna. The wireless sensor interface consumes 340 μW and uses capacitance-to-frequency conversion for readout of the vacuum-sealed pressure transducers. The integrated device has a 200 μm profile and a volume of 2 mm3. The system can sense a reduction in flow of 13%, corresponding to a differential pressure of 3 mmHg.
Keywords :
BiCMOS integrated circuits; biomedical telemetry; microsensors; pressure measurement; pressure sensors; prosthetics; wireless sensor networks; 200 micron; 3 micron; 340 muW; BiCMOS circuit; arterial stenosis; backscatter-modulated passive-telemetry interface; battery-free sensing system; capacitance-to-frequency conversion; implantable sensor; monolithic integration; multisite pressure sensor; on-chip antenna; reference information; remotely powered system; silicon-on-glass; vacuum-sealed pressure transducers; wireless arterial flow characterization; wireless pressure measurement; wireless sensor interface; Arteries; Coatings; Current measurement; Drugs; Fluid flow measurement; Pressure measurement; Sensor phenomena and characterization; Sensor systems; System-on-a-chip; Wireless sensor networks; Implantable sensor; monolithic integration; on-chip antenna; pressure sensor; wireless telemetry;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2006.876668
