• DocumentCode
    962124
  • Title

    Laser Processing in Silicon Microelectronics Technology

  • Author

    Leamy, H.J.

  • Author_Institution
    Bell Laboratories, Murray Hill, NJ, USA
  • Volume
    5
  • Issue
    1
  • fYear
    1982
  • fDate
    3/1/1982 12:00:00 AM
  • Firstpage
    112
  • Lastpage
    117
  • Abstract
    Laser irradiation may effect either thermal or chemical changes in target materials. A brief review of the mechanisms involved and a summary assessment of their potential for application in silicon microelectronics technology is presented.
  • Keywords
    Integrated circuit fabrication; Laser applications, materials processing; Silicon materials/devices; Chemical lasers; Chemical technology; Electron beams; Integrated circuit technology; Laser beam cutting; Laser beams; Microelectronics; Optical materials; Silicon; Temperature;
  • fLanguage
    English
  • Journal_Title
    Components, Hybrids, and Manufacturing Technology, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0148-6411
  • Type

    jour

  • DOI
    10.1109/TCHMT.1982.1135928
  • Filename
    1135928
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=962124