• DocumentCode
    965992
  • Title

    Permalloy films on silicon

  • Author

    Lee, R.N. ; Anderson, Wallace E. ; Liu, Yuan-Jye ; Schwee, Leonard J.

  • Author_Institution
    Naval Surface Weapons Center, Silver Spring, MD
  • Volume
    14
  • Issue
    5
  • fYear
    1978
  • fDate
    9/1/1978 12:00:00 AM
  • Firstpage
    1076
  • Lastpage
    1076
  • Abstract
    Permalloy cross-tie memory registers were fabricated on silicon substrates. The performance was comparable with that of similar devices on glass substrates.
  • Keywords
    Magnetic film memories; Permalloy memories; Silicon materials/devices; Cleaning; Glass; Magnetic films; Methanol; Registers; Semiconductor devices; Semiconductor films; Silicon; Substrates; Temperature distribution;
  • fLanguage
    English
  • Journal_Title
    Magnetics, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9464
  • Type

    jour

  • DOI
    10.1109/TMAG.1978.1059796
  • Filename
    1059796