• DocumentCode
    968105
  • Title

    Depth profiling of integrated circuits with thermal wave electron microscopy

  • Author

    Rosencwaig, A.

  • Author_Institution
    University of California, Lawrence Livermore Laboratory, Livermore, USA
  • Volume
    16
  • Issue
    24
  • fYear
    1980
  • Firstpage
    928
  • Lastpage
    930
  • Abstract
    Nondestructive depth profiling of integrated circuits is performed with thermal wave electron microscopy at 640 kHz modulation frequency.
  • Keywords
    electron microscope applications; integrated circuit testing; nondestructive testing; integrated circuits; nondestructive depth profiling; thermal wave electron microscopy;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19800662
  • Filename
    4245436
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=968105