Title :
Titanium Printed Capacitors for Microminiaturization
Author :
Huber, F. ; Bloxsom, J.
Author_Institution :
Republic Aviation Corporation,N.Y.
fDate :
6/1/1961 12:00:00 AM
Abstract :
It is shown in this paper that by an appropriate cleaning and forming procedure titanium metal can be anodically oxidized to a low leakage current, which makes it possible to use this material for capacitor fabrication. Experimental data are given for the metal/oxide/metal thin-film capacitor. A new "printing" technique especially suited for the fabrication of film capacitors in printed microminiaturized electronic circuits is described for the forming of the dielectric oxide layer.
Keywords :
Capacitors; Cleaning; Dielectric materials; Dielectric thin films; Fabrication; Inorganic materials; Leakage current; Printing; Thin film circuits; Titanium;
Journal_Title :
Component Parts, IRE Transactions on
DOI :
10.1109/TCP.1961.1136597
