Integrated semiconductor vertical-cavity surface-emitting lasers and PIN photodetectors for biomedical fluorescence sensing

Vertical-cavity surface-emitting lasers (VCSELs), optical emission filters, and PIN photodetectors were fabricated as part of a monolithically integrated near-infrared fluorescence detection system. The integration of these micro-fabricated components with micro-arrays, flow channel arrays, and biochips can drastically reduce cost and enable parallel sensing architectures. An optoelectronic design is presented that integrates VCSELs, optical filters, and photodetectors through a modification to a typical VCSEL structure. System designs were simulated and compared, leading to several innovative approaches for integrated sensors. The laser and detector modules were characterized independently and subsequently integrated to form a complete sensor. VCSELs with oxidation apertures measuring 4, 7, 14, and 20 μm showed a lasing wavelength of λ=773 nm, threshold current densities from 6400 to 1300 A·cm^-2, and maximum output powers of 0.6-4 mW, with transverse single-mode and multimode operation. PIN photodetectors were fabricated with integrated emission filters. Quantum efficiencies above 85% were observed with a dark current of 500 fA/(mm detector diameter). Complete sensor units were tested and near-infrared fluorescent molecules (IR-800) were detected. A theoretical detection limit of 10⁵ fluorophores/μm² was determined. The compact parallel architecture, high-power laser, and low-noise photodetector make this sensor a good candidate for biomedical fluorescence-based sensing applications.