• DocumentCode
    970210
  • Title

    A Bilevel Thin Film Hybrid Circuit Containing Crossovers, Resistors, Capacitors, and Integrated Circuits

  • Author

    Brady, Thomas E. ; Hindermann, David K.

  • Author_Institution
    Bell Telephone Laboratories, Naperville, Ill.
  • Volume
    9
  • Issue
    3
  • fYear
    1973
  • fDate
    9/1/1973 12:00:00 AM
  • Firstpage
    181
  • Lastpage
    185
  • Abstract
    Here is a discussion on the fabrication, characterization, and economic considerations of a set of complex hybrid integrated circuits being used in exploratory switching applications. Several approaches to fabrication are discussed. One approach is unique in that it includes four distinct technologies in addition to simple thin film interconnections. They are (1) beam crossovers, (2) thin film resistors, (3) thin film capacitors, and (4) metallized via holes to a backplane. Alternate approaches including discrete capacitor elements are also discussed.
  • Keywords
    Integrated circuit fabrication; Integrated circuit interconnections; Interconnections, Integrated circuits; Switching circuits; Thin-film circuits; Backplanes; Fabrication; Hybrid integrated circuits; Integrated circuit interconnections; Integrated circuit technology; Metallization; Resistors; Switched capacitor circuits; Switching circuits; Thin film circuits;
  • fLanguage
    English
  • Journal_Title
    Parts, Hybrids, and Packaging, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0361-1000
  • Type

    jour

  • DOI
    10.1109/TPHP.1973.1136722
  • Filename
    1136722