DocumentCode
970360
Title
Pressure measurement by GaAs piezoelectric sensors
Author
Fricke, K. ; Hartnagel, H.-L.
Author_Institution
Inst. fur Hochfrequenztech., Tech. Hochschule Darmstadt, West Germany
Volume
26
Issue
11
fYear
1990
fDate
5/24/1990 12:00:00 AM
Firstpage
693
Lastpage
694
Abstract
A new pressure sensor for pressures up to 100 bar and temperatures of about 200 degrees C is presented. It uses the piezoelectric effect of 111 oriented semi-insulating GaAs. This material allows the monolithic integration of sensor and electronic circuit.
Keywords
III-V semiconductors; field effect integrated circuits; gallium arsenide; piezoelectric transducers; pressure transducers; 0 to 100 bar; 0 to 200 C; GaAs piezoelectric sensors; monolithic integration; monolithic sensor with electronics; piezoelectric effect; pressure sensor; pressures; semiconductors; semiinsulating GaAs; temperatures;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19900452
Filename
106021
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