High-Power Single Transverse Mode Vertical-Cavity Surface-Emitting Lasers With Monolithically Integrated Curved Dielectric Mirrors

We report the monolithic integration of vertical-cavity surface-emitting lasers (VCSELs) with curved dielectric mirrors. The laser structure has an InGaAs/GaAs gain region and incorporates a photoresist pattern fabricated on the substrate side. A dielectric distributed Bragg reflector is applied on the curved photoresist surface which provides sufficient optical feedback for laser operation. On-wafer measurements at room temperature show single transverse mode output powers up to 15.0 mW under continuous wave operation.