DocumentCode
972705
Title
Single-interface enhanced mobility structures by metalorganic chemical vapour deposition
Author
Coleman, J.J. ; Dapkus, P.D. ; Yang, J.J.J.
Author_Institution
Rockwell International, Microelectronics Research and Development Center, Anaheim, USA
Volume
17
Issue
17
fYear
1981
Firstpage
606
Lastpage
608
Abstract
Enhanced mobility effects in single-interface 2-dimensional electron gas heterostructures grown by metalorganic chemical vapour deposition (MOCVD) are reported. The mobility/temperature characteristics of single-interface structures, with and without an undoped spacer to reduce coulomb scattering at the interface, are described.
Keywords
III-V semiconductors; aluminium compounds; carrier mobility; chemical vapour deposition; gallium arsenide; p-n heterojunctions; 2-dimensional electron gas heterostructures; GaAs-GaAlAs heterostructures; III-V semiconductors; coulomb scattering; metalorganic chemical vapour deposition; single-interface enhanced mobility structures;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19810426
Filename
4245902
Link To Document