DocumentCode
974519
Title
High coercivity and high saturation magnetization Mn-Al thin films
Author
Huang, J.H. ; Kuo, P.C. ; Shen, S.C.
Author_Institution
Inst. of Mater. Sci. & Eng., Nat. Taiwan Univ., Taipei, Taiwan
Volume
31
Issue
5
fYear
1995
fDate
9/1/1995 12:00:00 AM
Firstpage
2494
Lastpage
2498
Abstract
Mn-Al thin films with the composition of 31-68 at.% Mn were prepared by rf magnetron sputtering at various substrate temperatures then annealed in vacuum. Effects of the chemical composition, substrate temperature and annealing temperature on the magnetic properties of Mn-Al films have been investigated. The analysis of X-ray diffraction and magnetic measurement indicate that τ-phase was synthesized at a composition range of 40-60 at.% Mn. However, the formation of large amount of τ-phase occurred for Mn50-Al50 films, which have a high coercivity up to about 3000 Oe and a fairly large saturation magnetization of about 420 emu/cc
Keywords
X-ray diffraction; aluminium alloys; annealing; coercive force; ferromagnetic materials; magnetic thin films; magnetisation; manganese alloys; sputtered coatings; τ-phase; MnAl; X-ray diffraction; annealing temperature; chemical composition; coercivity; ferromagnetic phase; magnetic thin films; rf magnetron sputtering; saturation magnetization; substrate temperature; Annealing; Chemicals; Coercive force; Magnetic analysis; Magnetic films; Magnetic properties; Saturation magnetization; Sputtering; Temperature; Transistors;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/20.406550
Filename
406550
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