DocumentCode
975697
Title
Monte Carlo analysis of sensitivity of threshold voltage in small geometry MOSFETs
Author
Alvarez, A.R. ; Akers, L.A.
Author_Institution
Motorola, Mesa, USA
Volume
18
Issue
1
fYear
1982
Firstpage
42
Lastpage
43
Abstract
A Monte Carlo technique is used to investigate the effects of process variations on the threshold voltage of a small geometry MOSFET. Results indicate that by controlling the variation of process parameters to ±10%, the threshold voltage variation is limited to ± 110 mV at 0.739 V (15%).
Keywords
Monte Carlo methods; insulated gate field effect transistors; semiconductor device models; Monte Carlo analysis; effects of process variations; semiconductor device models; sensitivity; small geometry MOSFET; threshold voltage;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19820030
Filename
4246204
Link To Document