DocumentCode
977086
Title
Nonequilibrium EEDF in gas discharge plasmas
Author
Godyak, Valery A.
Author_Institution
Osram Sylvania, Res. & Dev., Beverly, MA
Volume
34
Issue
3
fYear
2006
fDate
6/1/2006 12:00:00 AM
Firstpage
755
Lastpage
766
Abstract
Nonequilibrium effects associated with spatial and temporal nonlocality between electron energy distribution and electromagnetic field in gas discharge plasmas at low gas pressures are reviewed in this paper. Formation of nonequilibrium EEDF is discussed for capacitive and inductive radio-frequency discharges. The possibility of electron temperature control is considered for gas discharge plasmas at nonequilibrium condition
Keywords
high-frequency discharges; plasma sources; plasma temperature; plasma thermodynamics; capacitive radiofrequency discharges; electromagnetic field; electron energy distribution; electron temperature control; gas discharge plasmas; gas pressures; inductive radiofrequency discharges; nonequilibrium effects; Discharges; Distribution functions; Electromagnetic fields; Electron beams; Ionization; Plasma accelerators; Plasma density; Plasma sheaths; Plasma temperature; Radio frequency; Electron energy distribution function (EEDF); electron kinetics; gas discharge; nonequilibrium;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/TPS.2006.875847
Filename
1643303
Link To Document