• DocumentCode
    977306
  • Title

    Boron-doped glass-coated Mo-Si interaction

  • Author

    Singh, Ashutosh ; Singh, Awatar

  • Author_Institution
    Dipartimento di Fisica Dell Universita, Modena, Italy
  • Volume
    74
  • Issue
    1
  • fYear
    1986
  • Firstpage
    224
  • Lastpage
    225
  • Abstract
    This letter gives the first report of molybdenum silicide formation by interaction of 1000-Å-thick sputtered molybdenum film and an N-Si
  • Keywords
    Annealing; Conductivity; Electrical resistance measurement; Etching; Furnaces; Glass; Nitrogen; Silicides; Silicon; Thickness measurement;
  • fLanguage
    English
  • Journal_Title
    Proceedings of the IEEE
  • Publisher
    ieee
  • ISSN
    0018-9219
  • Type

    jour

  • DOI
    10.1109/PROC.1986.13440
  • Filename
    1457708
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=977306