Interdigitated pn junction device with novel capacitance/voltage characteristic, ultralow capacitance and low punch-through voltage

The first demonstration of the recently disclosed channelling diode is reported. The structure combines important and unique features which can be used for a large variety of applications. The diode exhibits a novel capacitance/voltage characteristic; large capacitance variations (1 pF) have been achieved over a small voltage range. Operated as a PIN diode the device has an ultralow capacitance (0.05 pF) and a low punch-through voltage (2¿3 V). This small capacitance is largely independent of the detector area and of the doping of the layers. These features are important for ultralow noise PINFET receiver applications.