• DocumentCode
    981910
  • Title

    Nondestructive film thickness measurement on industrial diamond

  • Author

    Weglein, R.D.

  • Author_Institution
    Private Address, Los Angeles, USA
  • Volume
    18
  • Issue
    23
  • fYear
    1982
  • Firstpage
    1003
  • Lastpage
    1004
  • Abstract
    The surface-acoustic wave velocities on type IIA diamond, with and without a 1 ¿m-thick Au film, sputter deposited on one surface, were measured using an acoustic microscope at 50 MHz. From a computed SAW dispersion curve, the Aufilm thickness is inferred. There are high-frequency restrictions for this technique.
  • Keywords
    gold; metallic thin films; sputtered coatings; surface acoustic waves; thickness measurement; 50 MHz; Au-film thickness; SAW dispersion curve; acoustic microscope; sputter deposited; surface-acoustic wave velocities; type IIA diamond;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19820687
  • Filename
    4247037
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=981910