• DocumentCode
    984356
  • Title

    Determination of the stress profile in ion implanted garnets

  • Author

    Kersusan, J.P. ; Gerard, P. ; Gailliard, J.P. ; Jouve, H.

  • Author_Institution
    LETI, Commissariat A l´´Energie Atomique, Grenoble.
  • Volume
    17
  • Issue
    6
  • fYear
    1981
  • fDate
    11/1/1981 12:00:00 AM
  • Firstpage
    2917
  • Lastpage
    2919
  • Abstract
    This paper presents original results on the stress profile as determined by an optical interference fringes technique for a neon implantation at a dose of 2 × 1014cm-2. The stress is found from the deformation of the sample due to the implantation. A stripping method is applied to get the stress profiles after respectively a 140°C and 400°C annealing.
  • Keywords
    Ion implantation; Magnetic bubble films; Mechanical factors; Optical interferometry; Annealing; Compressive stress; Etching; Garnets; Magnetic materials; Optical films; Particle beam optics; Stress measurement; Substrates; Temperature;
  • fLanguage
    English
  • Journal_Title
    Magnetics, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9464
  • Type

    jour

  • DOI
    10.1109/TMAG.1981.1061494
  • Filename
    1061494
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=984356