Effect of fluorine incorporation on the thermal stability of PtSi/Si structure

Author

Bing-Yue Tsui ; Jiunn-Yan Tsai ; Wu, Tzong-Shien ; Chen, Mao-Chieh

Author_Institution

Dept. of Electron. Eng., Nat. Chiao-Tung Univ., Hsinchu, Taiwan

Volume

40

Issue

1

fYear

1993

fDate

1/1/1993 12:00:00 AM

Firstpage

54

Lastpage

63

Abstract

It was observed that the fluorine incorporation from ion implantation improved the high-temperature stability of a PtSi/Si structure. The optimum implantation energy was determined to be the energy at which the maximum percentage of the as-implanted fluorine ion locates at the PtSi/Si interface region. SIMS analysis shows that the fluorine atom piles up at the PtSi/Si interface. XPS analysis indicates that the fluorine atoms at the PtSi/Si interface are bonded to the silicon atoms in a form of SiF₂ or SiF₃. A fluorine-buffer model is proposed to explain the effect of fluorine incorporation. It is postulated that the Si-F layer acts as a buffer layer to change the PtSi/Si interface energy and preserve the integrity of the silicide layer at high temperature. Fluorinated Schottky junctions were fabricated and the electrical characteristics show that the sustainable process temperature can be improved from 650°C for the unfluorinated junctions to higher than 800°C for the fluorinated junctions

Keywords

Schottky effect; X-ray photoelectron spectra; fluorine; ion implantation; platinum compounds; secondary ion mass spectroscopy; silicon; 65 to 800 degC; PtSi-Si:F; SIMS analysis; Schottky junctions; XPS analysis; electrical characteristics; fluorine-buffer model; interface energy; ion implantation; optimum implantation energy; sustainable process temperature; thermal stability; Annealing; Atomic layer deposition; Conductivity; Degradation; Forward contracts; Silicides; Silicon; Temperature; Thermal stability; Very large scale integration;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/16.249424

Filename

249424