• DocumentCode
    985561
  • Title

    High-resolution mapping of pn-junctions by computer-processed EBIC-signals

  • Author

    Schink, H.K. ; Rehme, H.

  • Author_Institution
    Siemens AG, Forschungslaboratorien, Mÿnchen, West Germany
  • Volume
    19
  • Issue
    10
  • fYear
    1983
  • Firstpage
    383
  • Lastpage
    385
  • Abstract
    Computer processing is introduced to increase resolution in EBIC measurements.
  • Keywords
    electronic engineering computing; integrated circuit testing; p-n junctions; scanning electron microscope examination of materials; EBIC image processing; EBIC signals; IC testing; SEM; computer processed; doping distributions; high resolution mapping; integrated circuits; p-n junctions; two-dimensional potential distributions;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19830266
  • Filename
    4247718
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=985561