Title :
Composition control in proton-exchanged LiNbO3
Author :
Jackel, J.L. ; Rice, C.E. ; Veselka, J.J.
Author_Institution :
Bell Laboratories, Holmdel, USA
Abstract :
The amount of hydrogen in Li1¿xHxNbO3 layers prepared by proton exchange of LiNbO3 in benzoic acid melts can be limited by adding lithium compounds to the melt. Limiting exchange prevents surface damage, a problem primarily affecting y-cut substrates, and reduces scattering in exchanged guides.
Keywords :
chemical exchanges; crystal growth from melt; lithium compounds; spectrochemical analysis; surface acoustic wave devices; H ion concentration; Li1-xHxNbO3 layers; LiNbO3; SAW devices; benzoic acid melts; chemical exchange; composition control; crystal growth; exchanged guides; proton exchange; spectrochemical analysis; surface damage prevention; y-cut substrates;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19830268
