DocumentCode
986241
Title
Vacuum arc discharges used to deposit hard wear resistant coatings onto tools
Author
Gabriel, Herbert M.
Author_Institution
PVT Plasma & Vakuum Technik GmbH, Weiterstadt, Germany
Volume
21
Issue
5
fYear
1993
fDate
10/1/1993 12:00:00 AM
Firstpage
416
Lastpage
418
Abstract
The arc-ion-plating process used to deposit hard wear-resistant coatings onto tools is described in detail. Descriptions are provided of the basic arc deposition technology, the microdroplets and potential ways to eliminate them, and the arc evaporation sources and vacuum coating systems. The benefits of hard coatings for cutting tools are discussed
Keywords
arcs (electric); ion plating; plasma deposition; vacuum deposition; arc deposition technology; arc evaporation sources; arc-ion-plating process; cutting tools; hard coatings; hard wear resistant coatings; microdroplets; tools; vacuum coating systems; Anodes; Arc discharges; Cathodes; Coatings; Plasma density; Plasma materials processing; Plasma sources; Plasma temperature; Vacuum arcs; Vacuum technology;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/27.249618
Filename
249618
Link To Document