DocumentCode
986950
Title
The proper use of electrostatic probes in electrodeless RF plasmas
Author
Cantin, A. ; Gagne, R.
Author_Institution
Canad. Armament R&D Establ., Quebec, Canada
Volume
16
Issue
2
fYear
1968
fDate
3/1/1968 12:00:00 AM
Firstpage
279
Lastpage
282
Abstract
The dc characteristics of electrostatic probes can be modified considerably by the presence of an RF voltage across the junction between the probe and the plasma. Data are presented showing typical examples of such modification of double probe characteristics. It is shown how a correct probe characteristic can be obtained by proper design of the probe and measuring circuit.
Keywords
Electrostatic devices; Plasmas; Probe antennas; Electric breakdown; Electrons; Electrostatics; Plasma applications; Plasma diagnostics; Plasma measurements; Plasma properties; Plasma sheaths; Probes; Radio frequency;
fLanguage
English
Journal_Title
Antennas and Propagation, IEEE Transactions on
Publisher
ieee
ISSN
0018-926X
Type
jour
DOI
10.1109/TAP.1968.1139158
Filename
1139158
Link To Document