DocumentCode :
987878
Title :
Application of indium-tin-oxide with improved transmittance at 1.3 mu m for MSM photodetectors
Author :
Seo, Jong-Wook ; Caneau, Catherine ; Bhat, Rajaram ; Adesida, Ilesanmi
Author_Institution :
Center for Compound Semicond. Microelectron., Illinois Univ., Urbana, IL, USA
Volume :
5
Issue :
11
fYear :
1993
Firstpage :
1313
Lastpage :
1315
Abstract :
The optical transmittance of indium-tin oxide (ITO) at a wavelength of 1.3 mu m has been improved by adding forming gas (H/sub 2//N/sub 2/) to the Ar sputtering gas. It is shown that the presence of H/sub 2/ in the plasma decreases the carrier concentration in ITO and increases the optical transmittance of a 320 nm-thick ITO film from 69.7% to 99.5%. The application of the high transmittance ITO to the fabrication of metal-semiconductor-metal (MSM) photodiodes on InAlAs/InGaAs heterostructures has resulted in an improvement of responsivity from 0.6 A/W to 0.76 A/W. This is double the responsivity of 0.39 A/W obtained for Ti/Au detectors. A 3-dB bandwidth of 6 GHz was obtained for the high transparency ITO device with 3 mu m fingers and gaps and with an area of 50 mu m*50 mu m.<>
Keywords :
carrier density; infrared detectors; light transmission; metal-semiconductor-metal structures; optical films; photodetectors; photodiodes; semiconductor thin films; sputtered coatings; transparency; 1.3 micron; 3 micron; 3-dB bandwidth; 320 nm; 50 micron; 6 GHz; Ar sputtering gas; Ar-H/sub 2/-N/sub 2/; H/sub 2//N/sub 2/; ITO; InAlAs-InGaAs; InSnO; MSM photodetectors; MSM photodiodes; carrier concentration; fabrication; forming gas; high transmittance; high transparency ITO device; improved transmittance; optical transmittance; plasma; responsivity; Argon; Indium compounds; Indium gallium arsenide; Indium tin oxide; Optical device fabrication; Optical films; Photodiodes; Plasma applications; Plasma waves; Sputtering;
fLanguage :
English
Journal_Title :
Photonics Technology Letters, IEEE
Publisher :
ieee
ISSN :
1041-1135
Type :
jour
DOI :
10.1109/68.250054
Filename :
250054
Link To Document :
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