Title :
Channel-buffer (substrate) interface phenomena in GaAs MESFETs fabricated by molecular-beam epitaxy
Author :
Shenai, Krishna ; Dutton, Robert W.
Author_Institution :
Integrated Circuits Lab., Stanford Univ., CA, USA
fDate :
5/1/1988 12:00:00 AM
Abstract :
A fundamental understanding of the channel-buffer (substrate) interface is obtained from an experimental and theoretical investigation of long-channel GaAs MESFETs fabricated by molecular-beam epitaxy (MBE). A low-field channel pinchoff mechanism is studied in which the carrier concentration in the near-pinchoff regime is obtained from an exact solution of Poisson´s equation in such a way as to conserve the total charge in the entire device. One the basis of these calculations it is shown that resolution of the order of a Debye length is feasible in the determination of the impurity profile in the vicinity of homojunction interfaces from the conventional capacitance-voltage profiling technique. The threshold-voltage dependence on the semiconductor crystal lattice temperature indicates that steady-state carrier trapping and accumulation of operation. The variations of the threshold voltage and negative charge in donor-like states at the channel-buffer (substrate) interface play a detrimental role in both the linear and saturated regimes of device gate capacitance with substrate bias are consistent with each other and suggest that a significant reduction in the channel charge occurs with increased reverse bias on the substrate
Keywords :
III-V semiconductors; Schottky gate field effect transistors; carrier density; gallium arsenide; interface electron states; Debye length; GaAs; MBE; MESFETs; Poisson´s equation; capacitance-voltage profiling technique; carrier concentration; channel buffer interface phenomena; channel charge; crystal lattice temperature; donor-like states; gate capacitance; homojunction interfaces; impurity profile; low-field channel pinchoff mechanism; molecular-beam epitaxy; negative charge accumulation; steady-state carrier trapping; substrate bias; threshold-voltage dependence; Capacitance-voltage characteristics; Gallium arsenide; Interface phenomena; Lattices; MESFETs; Molecular beam epitaxial growth; Poisson equations; Semiconductor impurities; Substrates; Temperature dependence;
Journal_Title :
Electron Devices, IEEE Transactions on