DocumentCode :
990884
Title :
Algorithms and models for cellular based topography simulation
Author :
Strasser, Ernst ; Selberherr, Siegfried
Author_Institution :
Inst. for Microelectronics, Tech. Univ. Wien, Austria
Volume :
14
Issue :
9
fYear :
1995
fDate :
9/1/1995 12:00:00 AM
Firstpage :
1104
Lastpage :
1114
Abstract :
A general simulation method for three-dimensional surface advancement has been developed and coupled with physical models for etching and deposition. The surface advancement algorithm is based on morphological operations derived from image processing which are performed on a cellular material representation. This method allows arbitrary changes of the actual geometry according to a precalculated etch or deposition rate distribution and can support very complex structures with tunnels or regions of material which are completely disconnected from other regions. Surface loops which result from a growing or etching surface intersecting with itself are inherently avoided. The etch or deposition rate distribution along the exposed surface is obtained from macroscopic point advancement models which consider information about flux distributions and surface reactions of directly and indirectly incident particles
Keywords :
digital simulation; etching; lithography; semiconductor process modelling; surface topography; cellular based topography simulation; cellular material representation; deposition rate distribution; etch rate distribution; flux distributions; macroscopic point advancement models; morphological operations; physical models; surface reactions; three-dimensional surface advancement; Anisotropic magnetoresistance; Biological materials; Circuit simulation; Computational modeling; Etching; Morphological operations; Shape; Solid modeling; Surface morphology; Surface topography;
fLanguage :
English
Journal_Title :
Computer-Aided Design of Integrated Circuits and Systems, IEEE Transactions on
Publisher :
ieee
ISSN :
0278-0070
Type :
jour
DOI :
10.1109/43.406712
Filename :
406712
Link To Document :
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