Title :
In-the-lens secondary electron analyser for IC internal voltage measurements with electron beams
Author :
Menzel, E. ; Buchanan, R.
Author_Institution :
Applied Beam Technology Inc., Fremont, USA
Abstract :
A new analyser scheme for voltage measurements on integrated circuits is described. The analyser is built into the objective lens of a scanning electron microscope. It features small working distances, high voltage resolution capability, high transmission, and reduced sensitivity to measurement errors.
Keywords :
electron probes; integrated circuit technology; scanning electron microscopy; secondary electron emission; voltage measurement; IC internal voltage measurements; electron beams; electron probe; high voltage resolution capability; in the lens analyser; integrated circuits; measurement errors; objective lens; scanning electron microscope; secondary electron analyser;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19840282
